Design and prototyping of MEMS
Development, design, simulation and prototyping of microelectromechanical systems (MEMS). Proprietary surface micromachining technology (implemented in-house) for MEMS prototyping. Also common silicon bulk micromachining technologies are available. Assembly and testing of prototypes. Implementation and demonstration of MEMS-containing devices and systems.

MEMS, sensors and actuators, design and technology

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