Thin film deposition system: deposition using electron beam evaporation
Description:
Thin film deposition system: deposition using electron beam evaporation

Keywords:
thin films

Field of Science:
Diagnostic and measurement technologies
Technical specification:
Two (up to 8 kW) sources of electronic beam evaporation; deposition system`s vacuum device for thin film deposition; vacuum rotational pump (A365-01-935, E2M80 std 240 415 3)
Usage area:
Growing films in vacuum
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