Electron beam lithography, electron microscope, energy dispersive spectroscopy
Description:
Electron beam lithography, electron microscope, energy dispersive spectroscopy

Keywords:
Nanolithography, scanning electron microscopy, surface chemical analysis, EDX, EBL, EDS

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy, Featured research equipment
Technical specification:
Field emission cathode, acceleration voltage variable from 20 V to 30 kV, laser interferometer, dry vacuum system, sample size up to 102x102 mm, electron microscope, surface chemical analysis from Be (Z=4) to Am (95)
Usage area:
Nanolithography, electron microscopy, surface chemical analysis
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