Spin coater and hotplate - SPS Polos 200
Description:
The SPS Polos 200 is a high-performance spin-coater designed for application of thin films onto substrates. It features customizable spin speeds and acceleration profiles, allows defining multiple process steps. The system accommodates a variety of substrates and coating materials, but is mostly used for spin coating resists for photolithography or electron beam lithography.
The system is installed in a class ISO5 cleanroom.
Keywords:
nanofabrication, thin film, spin coating, lithography
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Technical specification:
- Spin speed: <10000 RPM
- Duration: 1-999 s
- Sample size: <150 mm (6")
- Hotplate temperature range: 50ºC - 250ºC
- Hotplate area: 230x230 mm2
Short description:
thin film deposition and coating, micro- and nanofabrication
thin film deposition and coating, micro- and nanofabrication