
Energy dispersive X-Ray analysis, Determination of chemical composition , elemnt mapping
Keywords:
Chemical composition, energy dispersion, element mapping, microanalysis, x-ray energy dispersion spectrometer, chemical element analysis, chemical element distribution, EDS, EDX
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Detectable elements from Boron (5) to Americium (95). Energy resolution 133 eV (Mn K alfa). Spatial resolution < 1 um3. Thermoelectric cooling.
material characterization and analysis, microscopy and imaging