Thermal eveporation system integrated into the glove-box
Keywords:
Thermal evaporation, organic semiconductor, OLED, organic electronics
New materials for high-tech, Technologies for sustainable development and energy
Mbraun glove-box, gas purification system, gas purification system for closed cycle cirulation, Rotary vane pump and turmolecular pumps, Sensor-Set: H2O-analyzer and O2-analyzer, 2 x thermal evaporators for metals, 2 x evaporators for organics (temperature range: 50°C up to 600°C, typical deposition rates: (10-3)… 5 nm/sec)
Organic electronics device formation