ICP RIE: Micro- and nanofabrication by reactive ion etching
Description:

Reactive ion etching is performed using an inductively coupled plasma reactive ion etching tool PlasmaTherm Apex SLR (up to 6").

Keywords:
inductively coupled plasma (ICP), reactive ion etching (RIE), nanofabrication

Field of Science:
Technologies for sustainable development and energy
IBE: Ion beam etching system - USI-IONIC
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RIE/PECVD: Reactive ion etching and plasma enhanced chemical vapor deposition system - PlasmaTherm PK-2430
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ICP RIE: Inductively coupled plasma reactive ion etching system - PlasmaTherm Apex SLR
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