Research and development of microsystems
Description:
null

Keywords:
Microsystems

Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Scale KERN PLE 310-3N
Read more
MPCVD: Microwave plasma enhanced chemical vapor deposition system - iplas Cyrannus I-6
Read more
Optical & fluorescence microscopes - OPTIKA B-600 MET & OPTIKA B-353FL
Read more
Spin coater
Read more
Laser ellipsometer - Gaertner L115
Read more
Magnetron sputtering tool - LH A700
Read more
ICP RIE: Inductively coupled plasma reactive ion etching system - PlasmaTherm Apex SLR
Read more
Request form