Lloyd`s mirror holographic lithography setup.
Description:
Lloyd`s mirror holographic lithography setup.

Keywords:
Laser, UV, holographic lithography, periodical structures, diffraction gratings, interference lithography, lithography, one dimensional, two dimensional three dimensional

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification:
Loyd`s mirror holographic lithography setup. The setup is capable to pattern structures with periods less than 500 nm
Usage area:
Holographic lithography, micro-fabrication
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