Silicon nitride coatings
Description:
Silicon nitride coatings from plazma using ammonia NH4 and silane SiH4 gases. We can get different hardness and electrical conductivity coatings.
Silicon nitride coatings from plazma using ammonia NH4 and silane SiH4 gases. We can get different hardness and electrical conductivity coatings.
Keywords:
PECVD, silicon nitride
Field of Science:
Diagnostic and measurement technologies, Smart environments and information technology
Diagnostic and measurement technologies, Smart environments and information technology