Atomic-force microscopy (AFM) or scanning-force microscopy (SFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. The information is gathered by "feeling" or "touching" the surface with a mechanical probe. Technical specifications: maximum scanned area of 110x110 μm, the largest surface height of 22 μm, vertical resolution Z 0.34 nm, horizontal XY resolution of 1.4 nm.
Keywords:
Structure, AFM
Diagnostic and measurement technologies, Smart environments and information technology