Service of electron beam lithography, laser, ultrasound and other technologies
Description:
Photo template manufacture using electron beam lithography. Structure scale from 100 nm. Micro and nano structures forming on conductive surfaces.
Photo template manufacture using electron beam lithography. Structure scale from 100 nm. Micro and nano structures forming on conductive surfaces.
Keywords:
EBL, Lithography, 3D structures
Field of Science:
Diagnostic and measurement technologies, Smart environments and information technology
Diagnostic and measurement technologies, Smart environments and information technology