Cleanrooms are closed spaces with precise control of temperature, humidity, pressure, and the concentration of airborne particles. ISO 14644-1 standard describes 9 cleanroom classes based on the particle concetration. The cleanroom in "Santaka" valley is class ISO5, which means that there are <3520 particles of size >0,5 um per 1 m3 of air inside it. Standards also describe the rules for tool use, personnel protective garments and cleaning procedures to ensure the control of all the relevant ambient conditions. Such strict requirements result in a much higher device yield, especially those with functional elements on the order of micrometers or even nanometers.
Access to cleanroom requires passing a cleanroom introduction and chemical safety courses, as well as relevant tool training.
Keywords:
cleanroom, process control
Technologies for sustainable development and energy