Applications of plasmochemical technologies: etching of elementary and complex semiconductors, dielectrics and conductors in active gas plasma

Keywords:
elementary and complex semiconductors; etching of semiconductors, dielectrics and conductors; active gas plasma

Field of Science:
Diagnostic and measurement technologies
Ellipsometer L117 No.166-AK
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Ion etching device
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Diodic AD vacuum system
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Dark field microscope with extras NIKON Eclipse LV100D
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Thin films` deposition controller and monitor Inficon XTM/2
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Raman spectroscopy system
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Spectrophotometer CHEM4-UV-FIBER
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