Design and prototyping of MEMS
Description:
Development, design, simulation and prototyping of microelectromechanical systems (MEMS). Proprietary surface micromachining technology (implemented in-house) for MEMS prototyping. Also common silicon bulk micromachining technologies are available. Assembly and testing of prototypes. Implementation and demonstration of MEMS-containing devices and systems.
Development, design, simulation and prototyping of microelectromechanical systems (MEMS). Proprietary surface micromachining technology (implemented in-house) for MEMS prototyping. Also common silicon bulk micromachining technologies are available. Assembly and testing of prototypes. Implementation and demonstration of MEMS-containing devices and systems.
Keywords:
MEMS, sensors and actuators, design and technology
Field of Science:
New production processes, materials and energy efficiency
New production processes, materials and energy efficiency