Description:
Concurrent development of numerical calculation methods and professional design software for MEMS launched great opportunities for mathematical evaluation of mechanical, electromechanical and acoustic phenomena. Finite element method is an integral part of contemporary mechanical engineering. Modern finite element software package contains thermal, electromagnetic and fluid properties simulation environment. This enables to perform the analysis in multiple energy domains and effectively obtain trans-domain data with informative value comparable to those complex experimental investigations involving studies of materials properties. This fact is particularly significant while creating MEMS mathematical models, because in most of the cases the effective properties of structural materials can be evaluated only by complex indirect measurements or device prototype experimental tests.

Field of Science:
New production processes, materials and energy efficiency