Silicon nitride coatings
Description:
Silicon nitride coatings from plazma using ammonia NH4 and silane SiH4 gases. We can get different hardness and electrical conductivity coatings.
Silicon nitride coatings from plazma using ammonia NH4 and silane SiH4 gases. We can get different hardness and electrical conductivity coatings.
Keywords:
PECVD, silicon nitride
Field of Science:
Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency