Femtosecond laser micro- and nanofabrication system FemtoLab uses Yb:KGW laser Pharos, emitting 1030 nm, <4W, >270 fs pulses. Laser ablation can be performed using the fundamental wavelength, or higher harmonics (2H 515 nm, 3H 343 nm). Three ablation modes are available:

• laser beam ablation by moving the sample (position accuracy >100 nm, resolution >1 um, wavlenegths 1030 nm, 515 nm, 343 nm;
• laser beam ablation on flat and curved surfaces using a galvoscanner (resolution >20 um, wavelength 1030 nm);
• laser beam ablation using an interference field (periodicity 0.8-1.1 um, variable orientation, wavelength 515 nm).