Diamond like carbon: synthesis and investigations
Description:
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Keywords:
diamond like carbon
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Mask aligner MA-750
Picoammeter / DC source - Keithley 6487
Spin coater
E-beam evaporator - YBH-71D3
EBL: E-beam lithography tool - Raith e-Line Plus
Magnetron sputtering tool - LH A700
XPS: Universal X-Ray photoelectron and ion scatering spectroscopy surface analysis system - ThermoFisher ESCALAB 250Xi