Innovative materials and structures research in physical and chemical materials analysis

surface, nonostructures, nonocomposites, thin films

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
The fiber-optic spectrometer AvaSpec-2048
Fourier transform infrared spectrometer
microwave plasma enhanced chemical vapor deposition system
ion etching system
vacuum evaporation unit
diamond like carbon ion beam synthesis system
RF reactive ion etching system
vacuum evaporation unit
picoammeter / bias source
Raman scattering spectrometer Renishaw in Via Spectrometer with accessories
dynamic microhardness meter
vacuum evaporation unit
ICP deep reactive etching system,
Universal surface analysis system for X-Ray photoelectron spectroscopy, ion scatering spectroscopy, reflection electron energy loss spectroscopy, and angle Resolved XPS (ARXPS)
Spectroscopic ellipsometer
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