Magnetron sputtering tool - LH A700
Description:
System is installed in a class ISO5 cleanroom.
Keywords:
nanofabrication, thin film, vacuum deposition, magnetron sputtering
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification:
- Base pressure:
- Sample size:
- Materials:
Usage area:
thin film deposition and coating, micro- and nanofabrication
thin film deposition and coating, micro- and nanofabrication