ion etching system
Description:
ion etching system
ion etching system
Keywords:
ion beam etching, surface microfabrication
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification:
homogeneous etching area diamater 8 cm
homogeneous etching area diamater 8 cm
Usage area:
ion beam etching, surface microfabrication
ion beam etching, surface microfabrication