MPCVD: Microwave plasma enhanced chemical vapor deposition system - iplas Cyrannus I-6
Description:
microwave plasma enhanced chemical vapor deposition system
Keywords:
thin film and coating deposition
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Technical specification:
plasma source diameter 6", power 6 kW frequeency 2.45 GHz homogeneous deposition area diameter 5 cm
Usage area:
thin film deposition and coating
thin film deposition and coating