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Spectroscopic ellipsometer
Description: Spectroscopic ellipsometer

Keywords: Spectroscopic ellipsometer, optical constants, refractive index, absorption coefficient, extinction, dispersion, dispersion curve, thickness determination, ellispometer

Field of Science: Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification: Spectroscopic ellipsometer covers UV-VIS-NIR spectral range. Available angles for measurements 12-90 deg with 0.01 deg resolution. Possibility to measure with focused beam 70x150 um. High resolution UV-VIS detector covers 190-900 nm range with 0.5 nm resolution, fast UV-VIS detector covers spectral range of 190-900 nm (1024 wavelengths), high resolution NIR detector 800-2000 nm with 3 nm resolution. Automated sample positioning with sample visualization via digital camera.
Usage area: Device is feasible to analyse optical constants (k(λ), n(λ)), thickness of thin isotropic and anisotropic transparent and non-transparent layers on isotropic and anisotropic transparent and non-transparent substrates. It can be also used for evaluations of periodical structures (scatterometry) and absorption kinetics in liquids.
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