Spectroscopic ellipsometer - Semilab GES5E
Description:
The device is capable of analyzing the optical constants (k(λ), n(λ)) and measuring the thickness of thin layers, both isotropic and anisotropic, on a wide range of substrates, whether transparent or opaque. It is suitable for examining non-transparent materials as well. Additionally, the system supports the evaluation of periodic structures (scatterometry) and can be used to monitor absorption kinetics in liquids.
Keywords:
Spectroscopic ellipsometer, optical constants, refractive index, absorption coefficient, extinction, dispersion, dispersion curve, thickness determination, ellispometer
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Technical specification:
- Spectral Range: UV-VIS-NIR
- Measurement Angles: 12°–90° with 0.01° resolution
- Focused Beam Size: 70 x 150 µm
- High-Resolution UV-VIS Detector:
- Spectral Range: 190–900 nm
- Resolution: 0.5 nm
- Fast UV-VIS Detector:
- Spectral Range: 190–900 nm
- 1024 wavelengths
- High-Resolution NIR Detector:
- Spectral Range: 800–2000 nm
- Resolution: 3 nm
- Automated Sample Positioning
- Sample Visualization: Digital camera
Usage area:
material characterization and analysis
material characterization and analysis