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Lloyd`s mirror holographic lithography setup.
Description: Lloyd`s mirror holographic lithography setup.

Keywords: Laser, UV, holographic lithography, periodical structures, diffraction gratings, interference lithography, lithography, one dimensional, two dimensional three dimensional

Field of Science: Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification: Loyd`s mirror holographic lithography setup. The setup is capable to pattern structures with periods less than 500 nm
Usage area: Holographic lithography, micro-fabrication
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