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Electron beam lithography, electron microscope, energy dispersive spectroscopy
Description: Electron beam lithography, electron microscope, energy dispersive spectroscopy

Keywords: Nanolithography, scanning electron microscopy, surface chemical analysis, EDX, EBL, EDS

Field of Science: Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification: Field emission cathode, acceleration voltage variable from 20 V to 30 kV, laser interferometer, dry vacuum system, sample size up to 102x102 mm, electron microscope, surface chemical analysis from Be (Z=4) to Am (95)
Usage area: Nanolithography, electron microscopy, surface chemical analysis
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