
Mask aligner and nanoimprint lithography
Keywords:
UV light, exposure, photolithography, optical lithography, nanoimprint lithography,
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
UV400: 350-450 nm; UV300: 280-350 nm; UV250: 240-260 nm. UV nanoimprint lithography, soft and hard contact, photomask size 102x102 and 127x127 mm.
Mask alignement, UV exposure, nanoimprint lithography