MMI

Spectroscopic ellipsometer - Semilab GES5E
Description:

The device is capable of analyzing the optical constants (k(λ), n(λ)) and measuring the thickness of thin layers, both isotropic and anisotropic, on a wide range of substrates, whether transparent or opaque. It is suitable for examining non-transparent materials as well. Additionally, the system supports the evaluation of periodic structures (scatterometry) and can be used to monitor absorption kinetics in liquids.

Keywords:
Spectroscopic ellipsometer, optical constants, refractive index, absorption coefficient, extinction, dispersion, dispersion curve, thickness determination, ellispometer

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification:
  • Spectral Range: UV-VIS-NIR
  • Measurement Angles: 12°–90° with 0.01° resolution
  • Focused Beam Size: 70 x 150 µm
  • High-Resolution UV-VIS Detector:
    • Spectral Range: 190–900 nm
    • Resolution: 0.5 nm
  • Fast UV-VIS Detector:
    • Spectral Range: 190–900 nm
    • 1024 wavelengths
  • High-Resolution NIR Detector:
    • Spectral Range: 800–2000 nm
    • Resolution: 3 nm
  • Automated Sample Positioning
  • Sample Visualization: Digital camera
Usage area:
material characterization and analysis
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