Stylus surface profilometer - Bruker Dektak Pro
Description:
Stylus profilometer used for high-precision surface metrology. It mechanically scans a fine stylus across a sample’s surface to measure surface topography and quantify features such as step heights, roughness, and film thickness with sub-nanometer accuracy. By taking many parallel measurements, a two-dimensional image of the surface topography can be acquired.
Stylus profilometer used for high-precision surface metrology. It mechanically scans a fine stylus across a sample’s surface to measure surface topography and quantify features such as step heights, roughness, and film thickness with sub-nanometer accuracy. By taking many parallel measurements, a two-dimensional image of the surface topography can be acquired.
Keywords:
null
Field of Science:
New production processes, materials and energy efficiency
New production processes, materials and energy efficiency
Technical specification:
Stylus radius: 12.5 µm;
Maximum sample size: 50 mm in height, 200 mm in diameter;
Maximum measured height: 1 mm;
Scan Length Range: 55 mm (200 mm with scan stitching capability);
Resolution for height measurement: 0.1 nm;
Motorized sample stage: 150 mm (6 in.) X/Y; continuous 360 degrees rotation;
Stylus force: 1-15 mg
Stylus radius: 12.5 µm;
Maximum sample size: 50 mm in height, 200 mm in diameter;
Maximum measured height: 1 mm;
Scan Length Range: 55 mm (200 mm with scan stitching capability);
Resolution for height measurement: 0.1 nm;
Motorized sample stage: 150 mm (6 in.) X/Y; continuous 360 degrees rotation;
Stylus force: 1-15 mg
Short description:
Determination of surface roughness or step height by measuring with a profilometer stylus probe that is scanned across the line over surface.
Determination of surface roughness or step height by measuring with a profilometer stylus probe that is scanned across the line over surface.