Magnetron sputtering tool - LH A700
Description:
The Leybold-Heraeus A700 sputtering tool is a versatile system designed for high-quality thin film deposition using DC sputtering. The system supports deposition of a wide range of metals. Its rotatable substrate holder ensures uniform coatings. Automated gas flow control and in situ monitoring
Keywords:
nanofabrication, thin film, vacuum deposition, magnetron sputtering
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Technical specification:
- Sputtering Process Type: DC sputtering
- Vacuum Range: High vacuum up to 1E-6 mbar
- Substrate Holder: Rotatable
Short description:
thin film deposition and coating, micro- and nanofabrication
thin film deposition and coating, micro- and nanofabrication