Spectroscopic ellipsometer
Description:
Spectroscopic ellipsometer
Spectroscopic ellipsometer
Keywords:
Spectroscopic ellipsometer, optical constants, refractive index, absorption coefficient, extinction, dispersion, dispersion curve, thickness determination, ellispometer
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification:
Spectroscopic ellipsometer covers UV-VIS-NIR spectral range. Available angles for measurements 12-90 deg with 0.01 deg resolution. Possibility to measure with focused beam 70x150 um. High resolution UV-VIS detector covers 190-900 nm range with 0.5 nm resolution, fast UV-VIS detector covers spectral range of 190-900 nm (1024 wavelengths), high resolution NIR detector 800-2000 nm with 3 nm resolution. Automated sample positioning with sample visualization via digital camera.
Spectroscopic ellipsometer covers UV-VIS-NIR spectral range. Available angles for measurements 12-90 deg with 0.01 deg resolution. Possibility to measure with focused beam 70x150 um. High resolution UV-VIS detector covers 190-900 nm range with 0.5 nm resolution, fast UV-VIS detector covers spectral range of 190-900 nm (1024 wavelengths), high resolution NIR detector 800-2000 nm with 3 nm resolution. Automated sample positioning with sample visualization via digital camera.
Usage area:
Device is feasible to analyse optical constants (k(λ), n(λ)), thickness of thin isotropic and anisotropic transparent and non-transparent layers on isotropic and anisotropic transparent and non-transparent substrates. It can be also used for evaluations of periodical structures (scatterometry) and absorption kinetics in liquids.
Device is feasible to analyse optical constants (k(λ), n(λ)), thickness of thin isotropic and anisotropic transparent and non-transparent layers on isotropic and anisotropic transparent and non-transparent substrates. It can be also used for evaluations of periodical structures (scatterometry) and absorption kinetics in liquids.