transient absorbtion measurement
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ion beam etchingh
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Metal, dielectric, semiconductor thin films: deposition by vacuum, plasma and ion assisted methods and investigations
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reactive ion etching
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deep reactive ion etching
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Device for roughness measurement of mechanical surfaces
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Formation and investigations of Schottky and ohmic contacts
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Deposition and investigations of the antireflective films
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Investigations of piezoresistive properties
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Device for multiplication of optical security marks MSM-1
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Laser interference lithography (LIL), hidden image holograms, 2D-3D holograms, rainbow holograms
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Optical document security measures and their production technologies and research
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laser microfabrication
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Laser ellipsometry
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Langmuir-Blodgett technique
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Diamond like carbon: synthesis and investigations
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Spin coating
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Optical microscopy
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Investigations of electrical properties
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Investigation of Rockwell hardness
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Investigation of microhardness and other micromechanical properties
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Evaporation of metal films
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Deposition of the diamond like carbon films
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Semiconductor surface passivation
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Analysis of optical properties
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scanning electron microscopy
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Characterization of molecules and mixtures
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Analysis of materials with Raman spectroscopy
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Device for roughness measurement of mechanical surfaces
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Device for replication of holograms
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Device for multiplication of holograms
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Innovative materials and structures research in physical and chemical materials analysis
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Research, development and applications of electron beam lithography
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Clean room rent
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Dielectric materials, thin film electrical characterization. Fuel cell component testing
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Quantitative and qualitative surface analysis using X-Ray photoelectron spectroscopy, Auger electron spectroscopy
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Research and development of microsystems
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Atomic force microscopy
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Dot-matrix hologram origination, photoresist
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