MMI
Optical lithography
Description:

Optical lithography

Keywords:
optinė litografija,topologijos,vaizdo formavimas,mikrogamyba,optical lithography,microfabrication

Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
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Mask aligner and nanoimprint lithography tool - OAI Hybralign 204IR
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