Optical lithography
Description:
Optical lithography is a microtechnology process to structure thin films. The designed layout is exposed through a photomask on a UV-sensitive layer of photoresist coated on a wafer or a wafer chip. Depending on the photoresist polarity, exposed areas will either wash out or remain after a development step. Optical lithography allows to form >1 μm microstructures.
Keywords:
optical lithography, microfabrication
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech
Diagnostic and measurement technologies, New materials for high-tech