Diamond like carbon: synthesis and investigations
Description:
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Keywords:
diamond like carbon
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Mask aligner MA-750
Picoammeter / DC source - Keithley 6487
Spin coater
E-beam evaporator - YBH-71D3
EBL: E-beam lithography tool - Raith e-Line Plus
Magnetron sputtering tool - LH A700
XPS: Universal X-Ray photoelectron and ion scatering spectroscopy surface analysis system - ThermoFisher ESCALAB 250Xi