Deposition and investigations of the antireflective films
Description:
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Keywords:
antireflective films
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
FTIR: Fourier transform infrared spectrometer - Bruker Vertex 70
IBE: Ion beam etching system - USI-IONIC
RIE/PECVD: Reactive ion etching and plasma enhanced chemical vapor deposition system - PlasmaTherm PK-2430
Diamond like carbon ion beam synthesis system
Spectroscopic ellipsometer - Semilab GES5E
Raman scattering spectrometer - Renishaw inVia
Magnetron sputtering tool - LH A700
XPS: Universal X-Ray photoelectron and ion scatering spectroscopy surface analysis system - ThermoFisher ESCALAB 250Xi