Deposition and investigations of the antireflective films
Description:
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Keywords:
Antireflekcinės plėvelės,paviršiaus formavimas,vakuuminės technologijos,antireflective films
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
FTIR: Fourier transform infrared spectrometer - Bruker Vertex 70
IBE: Ion beam etching system - USI-IONIC
Diamond like carbon ion beam synthesis system
RIE/PECVD: Reactive ion etching and plasma enhanced chemical vapor deposition system - PlasmaTherm PK-2430
Spectroscopic ellipsometer - Semilab GES5E
Raman scattering spectrometer - Renishaw inVia
Magnetron sputtering tool - LH A700
XPS: Universal X-Ray photoelectron and ion scatering spectroscopy surface analysis system - ThermoFisher ESCALAB 250Xi