MMI
Research and development of microsystems
Description:
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Keywords:
Microsystems

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Scale KERN PLE 310-3N
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MPCVD: Microwave plasma enhanced chemical vapor deposition system - iplas Cyrannus I-6
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Optical & fluorescence microscopes - OPTIKA B-600 MET & OPTIKA B-353FL
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Spin coater
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Laser ellipsometer - Gaertner L115
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Magnetron sputtering tool - LH A700
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ICP RIE: Inductively coupled plasma reactive ion etching system - PlasmaTherm Apex SLR
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