Research and development of microsystems
Description:
null
null
Keywords:
Microsystems,Mikrosistemos,MEMS,MOEMS
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Scale KERN PLE 310-3N
MPCVD: Microwave plasma enhanced chemical vapor deposition system - iplas Cyrannus I-6
Optical & fluorescence microscopes - OPTIKA B-600 MET & OPTIKA B-353FL
Spin coater
Laser ellipsometer - Gaertner L115
Magnetron sputtering tool - LH A700
ICP RIE: Inductively coupled plasma reactive ion etching system - PlasmaTherm Apex SLR