
Lloyd`s mirror holographic lithography setup.
Keywords:
Laser, UV, holographic lithography, periodical structures, diffraction gratings, interference lithography, lithography, one dimensional, two dimensional three dimensional
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Loyd`s mirror holographic lithography setup. The setup is capable to pattern structures with periods less than 500 nm
holography and lithography, micro- and nanofabrication