Lloyd's mirror holographic lithography setup
Description:
Lloyd`s mirror holographic lithography setup.
Keywords:
Laser, UV, holographic lithography, periodical structures, diffraction gratings, interference lithography, lithography, one dimensional, two dimensional three dimensional
Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Technical specification:
Loyd`s mirror holographic lithography setup. The setup is capable to pattern structures with periods less than 500 nm
Short description:
holography and lithography, micro- and nanofabrication
holography and lithography, micro- and nanofabrication