MMI

Lloyd's mirror holographic lithography setup
Description:

Lloyd`s mirror holographic lithography setup.

Keywords:
Laser, UV, holographic lithography, periodical structures, diffraction gratings, interference lithography, lithography, one dimensional, two dimensional three dimensional

Field of Science:
ICT technologies, inclusive and creative society, Health technologies, biotechnologies and safe food, New production processes, materials and energy efficiency
Technical specification:

Loyd`s mirror holographic lithography setup. The setup is capable to pattern structures with periods less than 500 nm

Short description:
holography and lithography, micro- and nanofabrication
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