MMI

Deposition and investigations of the antireflective films
Description:
null

Keywords:
antireflective films

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Fourier transform infrared spectrometer
vacuum evaporation unit
RF reactive ion etching system
ion etching system
diamond like carbon ion beam synthesis system
Raman scattering spectrometer Renishaw in Via Spectrometer with accessories
Universal surface analysis system for X-Ray photoelectron spectroscopy, ion scatering spectroscopy, reflection electron energy loss spectroscopy, and angle Resolved XPS (ARXPS)
Spectroscopic ellipsometer
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