MMI
Research, development and applications of optical and nanoimprint lithography
Description:
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Keywords:
Optical and nanoimprint lithography

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Scale KERN PLE 310-3N
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Optical and fluorescence microscope
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Spin coater for the formation of thin layers
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Spin coater for the formation of thin layers
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Laser ellipsometer L115
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