MMI

Research and development of microsystems
Description:
null

Keywords:
Microsystems

Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Scale KERN PLE 310-3N
Optical and fluorescence microscope
microwave plasma enhanced chemical vapor deposition system
vacuum evaporation unit
Laser ellipsometer L115
ICP deep reactive etching system,
Spin coater for the formation of thin layers
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