Energy dispersive X-Ray analysis, Determination of chemical composition , elemnt mapping
Keywords:
Chemical composition, energy dispersion, element mapping, microanalysis, x-ray energy dispersion spectrometer, chemical element analysis, chemical element distribution, EDS, EDX
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Detectable elements from Boron (5) to Americium (95). Energy resolution 133 eV (Mn K alfa). Spatial resolution < 1 um3. Thermoelectric cooling.
material characterization and analysis, microscopy and imaging