Lloyd's mirror holographic lithography setup
Description:
Lloyd`s mirror holographic lithography setup.
Keywords:
Laser, UV, holographic lithography, periodical structures, diffraction gratings, interference lithography, lithography, one dimensional, two dimensional three dimensional
Field of Science:
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Diagnostic and measurement technologies, New materials for high-tech, Technologies for sustainable development and energy
Technical specification:
Loyd`s mirror holographic lithography setup. The setup is capable to pattern structures with periods less than 500 nm
Usage area:
holography and lithography, micro- and nanofabrication
holography and lithography, micro- and nanofabrication