A laser ellipsometer is a precision optical instrument used to measure the thickness and optical properties of thin films on surfaces. It employs polarized laser light, which reflects off the sample, and analyzes changes in the polarization state to determine parameters such as refractive index and film thickness. This non-destructive technique is widely used in materials science, semiconductor manufacturing, and surface chemistry for characterizing surfaces at the nanometer scale.
Keywords:
laser ellipsometer, thin films, refractive index
Diagnostic and measurement technologies, Technologies for sustainable development and energy
- Wavelength 632.8 nm
- Thickness range 0.001 - 1 µm
- Uncertainty of thickness measurements ±(0.5 – 1) nm
- Accuracy of the refractive index measurements ±0.01.
material characterization and analysis