Power source of 1kW radiofrequency
Description:
Power source of 1kW radiofrequency
Power source of 1kW radiofrequency
Keywords:
thin films
Field of Science:
Diagnostic and measurement technologies
Diagnostic and measurement technologies
Technical specification:
4 magnetrons (cathodes with diameter of 2``), deposition system`s vacuum device for thin film deposition
4 magnetrons (cathodes with diameter of 2``), deposition system`s vacuum device for thin film deposition
Usage area:
Growing various films in vacuum
Growing various films in vacuum